Dr. Qingbo Wang Profile

Dr. Qingbo Wang

at Univ of Science and Technology of China

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Publications (3)

Proceedings Article | 28 August 2014 Paper

Fabrication of high aspect ratio silicon gratings by interference lithography and potassium hydroxide anisotropic etch technique

Yanchang Zheng, Keqiang Qiu, Xiaolong Jiang, Qingbo Wang, Lixiang Wu, Lali Bi, Yilin Hong

Proceedings Volume 9170, 917018 (2014) https://doi.org/10.1117/12.2058669

KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

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Proceedings Article | 30 August 2013 Paper

Improving the spectral resolution of soft x-ray flat-field spectrometer with multi-area gratings

Huoyao Chen, Zhengkun Liu, Qingbo Wang, Shaojun Fu

Proceedings Volume 8910, 89102A (2013) https://doi.org/10.1117/12.2035205

KEYWORDS: Spectral resolution, Diffraction gratings, Spectroscopy, Diffraction, X-rays, Image quality, Ray tracing, Optical design, Charge-coupled devices, X-ray technology

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Proceedings Article | 30 August 2013 Paper

Optimum design of a holographic parallel flat-field grating

Qing-bo Wang, Zheng-kun Liu, Huo-yao Chen, Shao-jun Fu

Proceedings Volume 8910, 89101X (2013) https://doi.org/10.1117/12.2034933

KEYWORDS: Spectral resolution, Holography, Optical design, Sensors, Spectrometers, Monochromatic aberrations, Tolerancing, Charge-coupled devices, Aberration theory, Image analysis

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