Dr. Rik van Laarhoven Profile

Dr. Rik van Laarhoven

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Soft x-ray: novel metrology for 3D profilometry and device pitch overlay

Christina Porter, Teis Coenen, Niels Geypen, Sandy Scholz, Loes van Rijswijk, Han-Kwang Nienhuys, Jeroen Ploegmakers, Johan Reinink, Hugo Cramer, Rik van Laarhoven, David O'Dwyer, Peter Smorenburg, Andrea Invernizzi, Ricarda Wohrwag, Hugo Jonquiere, Juliane Reinhardt, Omar el Gawhary, Simon Mathijssen, Peter Engblom, Heidi Chin, William Blanton, Sury Ganesan, Brian Krist, Florian Gstrein, Mark Phillips

Proceedings Volume 12496, 124961I (2023) https://doi.org/10.1117/12.2658495

KEYWORDS: Etching, Metrology, Overlay metrology, Signal detection, Diffraction, Semiconducting wafers, 3D metrology, X-rays, Nanosheets, Scatterometry

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Proceedings Article | 28 March 2017 Presentation + Paper

High-NA optical CD metrology on small in-cell targets enabling improved higher order dose control and process control for logic

Hugo Cramer, Elliott Mc Namara, Rik van Laarhoven, Ram Jaganatharaja, Isabel de la Fuente, Sharon Hsu, Filippo Belletti, Milos Popadic, Ward Tu, Wade Huang

Proceedings Volume 10145, 101451B (2017) https://doi.org/10.1117/12.2260268

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Process control, Logic, Etching, Metrology, Scanners, Manufacturing, Wafer testing, Reticles

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