A novel optical profiler is described in this paper for measurement of surface profiles of synchrotron radiation (SR)
mirrors. The measurement is based on a combination of an optical heterodyne technique and a precise phase
measurement procedure without a reference surface. A Zeeman two-frequency He-Ne laser is employed as the light
source. The common-path optical system, which uses a birefringent lens as the beam splitter, minimizes the effects
of air turbulence, sample vibration and temperature variation. A special autofocus system allows the profiler to
measure the roughness and shape of a sample surface. The optical system is mounted on a large linear air-bearing
slide, and is capable of scanning over distances covering the spatial period range from several microns to nearly one
meter with a high measurement accuracy.
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