We report on the realization of novel instruments for absolute vapor pressure measurements: (i) a novel vacuum system in which the saturation vapor pressure of low-volatile substances can be measured directly and accurately, (ii) optomechanical “membrane sandwich” squeeze film pressure sensors with enhanced pressure response and pressure sensitivities on a par with those of the best commercial capacitive diaphragm sensors.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.