Mr. Roshan Kanhirakkottil Profile

Roshan Kanhirakkottil

at A*STAR Institute of Microelectronics

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Publications (1)

Proceedings Article | 15 March 2024 Presentation + Paper

Material characterization of silicon dioxide cladding for photonic devices

Amy S. Tong, Doris K. Ng, Roshan Kanhirakkottil, Jia Sheng Goh, Jiamu Jin, Andrew W. Fong, Steven H. Lee, Hong Cai, Lennon Y. Lee

Proceedings Volume 12887, 128870E (2024) https://doi.org/10.1117/12.3001995

KEYWORDS: Refractive index, Cladding, Plasma enhanced chemical vapor deposition, Coating stress, Silica, Low pressure chemical vapor deposition, Surface roughness, Waveguides, Semiconducting wafers, Photonic devices

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