Mr. Samir Guerroudj Profile

Samir Guerroudj

at Minatec

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Proceedings Article | 30 April 2008 Paper

Inorganic color filters by MOCVD for CMOS imager and colorimetry

Samir Guerroudj, François Roy, Jean-Luc Deschanvres

Proceedings Volume 7001, 700109 (2008) https://doi.org/10.1117/12.780546

KEYWORDS: Thin films, Cobalt, Optical filters, Transmittance, Microlens, Absorption, Metalorganic chemical vapor deposition, Annealing, Zinc oxide, Thin film deposition

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A set of three thin films transmitting in the red, green and blue wavelengths have been demonstrated by the MOCVD aerosol technology. These thin films were elaborated with different organometallic precursors and deposited on glass or fused silica at different temperatures in the range of 350°C-550°C.The physicochemical characteristics enable us to observe the phases responsible for the color. The red one filter consists of a thin film of hematite-Fe₂O₃ with a transmittance peak of 75% at 630 nm. The green thin film is composed of Cobalt doped ZnO with a transmittance peak of 56% at 540nm. The blue thin film is composed of Cobalt doped Al₂O₃ with a transmittance peak of 65% at 450nm. Moreover, the absorbance spectra properties are discussed related to the physicochemical characteristics of the deposited films. Then, thanks to the best triplet we can evaluate the color reconstruction. Using a set of spectral files, a "color toolbox" software optimizes by the method of least squares the 3 by 3 color matrix, the white balance and the offset.

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