Sarah A. Okada
at Nova Measuring Instruments Inc.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper
Stefan Schoeche, Katherine Sieg, Daniel Schmidt, Mohsen Nasseri, Shogo Mochizuki, Marinus Hopstaken, Yaguang Zhu, Li Xiang, Julia Hoffman, Daniel Lewellyn, Paul Isbester, Sarah Okada
Proceedings Volume 12955, 1295508 (2024) https://doi.org/10.1117/12.3011666
KEYWORDS: Semiconducting wafers, Silicon, Epitaxy, Germanium, Nanosheets, Metrology, Annealing, Diffusion, Transistors

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