Dr. Siyang Xiao Profile

Dr. Siyang Xiao

at Boston Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Yiding Zhong, Do Hyun Park, Siyang Xiao, Liangwei Zheng, Chuanhua Duan

Proceedings Volume 12958, 129580C (2024) https://doi.org/10.1117/12.3010881

KEYWORDS: Etching, Silicon, Wet etching, Ions, Semiconductors, Industry, Amorphous silicon, Integrated circuits, Industrial applications

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