Dr. Somilkumar J. Rathi Profile

Dr. Somilkumar J. Rathi

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Publications (1)

Proceedings Article | 2 October 2024 Poster + Paper

Methodology for robust process window discovery in plasmonic nanostructures

Muthiah Annamalai, Somilkumar Rathi

Proceedings Volume 13111, 131110A (2024) https://doi.org/10.1117/12.3027327

KEYWORDS: Diffractive optical elements, Design, Plasmonics, Nanostructures, Fabrication, Physics, Semiconductors, Nanophotonics, Interfaces, Yield improvement

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