Dr. Stefan Eyring Profile

Dr. Stefan Eyring

Lead Systems Engineer at KLA-Tencor MIE GmbH

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Publications (3)

Proceedings Article | 10 April 2024 Presentation + Paper

Micro-scale in-device overlay

Boris Habets, Stefan Eyring, Mirko Wittkoetter, Frank Laske, Marc Filzen, Clemens Utzny

Proceedings Volume 12955, 1295518 (2024) https://doi.org/10.1117/12.3012648

KEYWORDS: Semiconducting wafers, Overlay metrology, Logic, Scanning electron microscopy, Design, Spatial resolution, Nonlinear optics, Interference (communication), Reproducibility, Target detection

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Proceedings Article | 13 June 2022 Presentation

Multi-layer, any-shape on-device overlay metrology

Stefan Eyring, Deepak Selvanathan, William Blanton, Nimrod Shuall, Frank Laske

Proceedings Volume PC12053, PC120530P (2022) https://doi.org/10.1117/12.2626772

KEYWORDS: Overlay metrology, Scanning electron microscopy, Electron microscopes, Multilayers, Measurement devices, Databases

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Proceedings Article | 9 July 2015 Paper

Investigation of local registration performance of IMS Nanofabrication’s Multi-Beam Mask Writer

Daniel Chalom, Jan Klikovits, David Geist, Peter Hudek, Stefan Eder-Kapl, Mehdi Daneshpanah, Frank Laske, Stefan Eyring, Klaus-Dieter Roeth

Proceedings Volume 9658, 965805 (2015) https://doi.org/10.1117/12.2196388

KEYWORDS: Photomasks, Metrology, Image registration, Nanofabrication, Calibration, Reticles, Beam shaping, Manufacturing, Lithography, Model-based design

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