Dr. Suhwan Park Profile

Dr. Suhwan Park

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 5 June 2023 Presentation + Paper

Characterization of interface charge traps in PE-TEOS and HDP oxide with different annealing temperatures using time-dependent second-harmonic generation

Ingi Kim, Suhwan Park, Minhwan Seo, Sunhong Jun, Sungyoon Ryu, Sangwoo Bae, Namil Koo, Yusin Yang

Proceedings Volume 12569, 1256904 (2023) https://doi.org/10.1117/12.2657070

KEYWORDS: Oxides, Second harmonic generation, Interfaces, Annealing, Silicon, Electric fields, Electrical properties, Dielectrics, Silicon films, Wafer inspection

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