Mr. Takahiro Iwasaki Profile

Takahiro Iwasaki

at KIOXIA Corp

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 1 May 2023 Presentation + Paper

Fabrication of dual damascene structure with nanoimprint lithography and dry-etching

Norikazu Takeuchi, Genna Hasegawa, Toshiaki Komukai, Takahiro Iwasaki, Masayuki Hatano, Motofumi Komori, Takuya Kono

Proceedings Volume 12497, 124970E (2023) https://doi.org/10.1117/12.2657912

KEYWORDS: Silica, Photoresist processing, Electron beam lithography, Resistance, Semiconducting wafers, Fabrication, Optical lithography, Lithography

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SPIE Journal Paper | 4 March 2022

Improvement of productivity by spin-coating and flash imprint lithography

Takahiro Iwasaki, Hirokazu Miyoshi, Anupam Mitra, Masayuki Hatano, Kazuya Fukuhara, Motofumi Komori, Takuya Kono, Tetsuro Nakasugi

JM3, Vol. 21, Issue 01, 011008, (March 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.1.011008

KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Lithography, Head, Photoresist processing, Coating, System on a chip, Overlay metrology, Capillaries, Ultraviolet radiation

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Proceedings Article | 22 February 2021 Presentation

Improvement of productivity by spin coating nanoimprint lithography

Takahiro Iwasaki, Hirokazu Miyoshi, Mitra Anupam, Masayuki Hatano, Motofumi Komori, Takuya Kono

Proceedings Volume 11610, 116100A (2021) https://doi.org/10.1117/12.2583676

KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Photoresist processing, Lithography, Semiconductors, Diffusion, Coating, Capillaries

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