Takaaki Kuribayashi
at Renesas Electronics Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 20 April 2011 Paper
Proceedings Volume 7971, 79711P (2011) https://doi.org/10.1117/12.879589
KEYWORDS: Etching, Lithography, Critical dimension metrology, Semiconducting wafers, Logic devices, Spatial resolution, Cadmium, Optical lithography, Resistance, Process control

Proceedings Article | 16 March 2009 Paper
Proceedings Volume 7274, 72742Q (2009) https://doi.org/10.1117/12.813987
KEYWORDS: SRAF, Logic devices, Critical dimension metrology, Optical simulations, Laser stabilization, Light sources, Combined lens-mirror systems, Computer simulations, Laser cutting, Tolerancing

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