Mr. Teun van Gogh Profile

Teun van Gogh

at ASML Netherlands B.V.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 16 November 2022 Presentation

Kaustuve Bhattacharyya, Rudy Peters, Greet Storms, Diederik de Bruin, Jara Santaclara, Rob van Ballegoij, Eelco van Setten, Teun van Gogh

Proceedings Volume PC12292, PC1229201 (2022) https://doi.org/10.1117/12.2644966

KEYWORDS: Extreme ultraviolet, Semiconductors, New and emerging technologies, Logic, Lithography, EUV optics

Proceedings Article | 13 June 2022 Presentation

Greet Storms, Sjoerd Lok, Rob van Ballegoij, Jan van Schoot, Rudy Peeters, Diederik de Bruin, Kars Troost, Teun van Gogh

Proceedings Volume PC12051, PC1205104 (2022) https://doi.org/10.1117/12.2617240

KEYWORDS: Extreme ultraviolet, Semiconductors, Lithography, Logic, EUV optics

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Keywords/Phrases