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Tian Feng
at Zhejiang Univ
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Publications (1)
Proceedings Article | 16 February 2010 Paper
Laser direct writing of submicron lines using micro- and nanofiber pens
Feng Tian, Guoguang Yang, Jian Bai, Jianfeng Xu, Qiaofen Zhou
Proceedings Volume 7591, 75910M (2010) https://doi.org/10.1117/12.840603
KEYWORDS: Photoresist materials, Nanofibers, Finite-difference time-domain method, Microscopes, Scanning electron microscopy, Waveguides, Cameras, 3D modeling, Atomic force microscopy, Image processing
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