Mr. Varun D. Kakkar Profile

Varun D. Kakkar

Sr. Design Engineer at ASML

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Publications (1)

Proceedings Article | 10 April 2024 Presentation + Paper

Holistic assessment and control of total CDU

Jo Finders, Vidya Vaenkatesan, Luc van Kessel, Ruben Maas, Tasja van Rhee, Varun Kakkar, Dominykas Gustas, Eelco van Setten, Claire van Lare

Proceedings Volume 12953, 1295303 (2024) https://doi.org/10.1117/12.3010890

KEYWORDS: Semiconducting wafers, Critical dimension metrology, Reticles, Scanners, Extreme ultraviolet lithography, Atomic force microscopy, 3D mask effects, Monte Carlo methods, Metrology, Simulations

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