Mr. Vic Nagano Profile

Vic Nagano

Marketing at Tokyo Electron US Holdings Inc

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Publications (1)

Proceedings Article | 22 January 2001 Paper

High-performance devices in the new century: optical lithography and mask strategy for 0.13-um SoC (Photomask Japan 2000 panel discussion review)

Hiroichi Kawahira, Vic Nagano

Proceedings Volume 4186, (2001) https://doi.org/10.1117/12.410715

KEYWORDS: Photomasks, System on a chip, Lithography, Optical lithography, Optical proximity correction, Mask making, Printing, Critical dimension metrology, Chemical mechanical planarization, Semiconducting wafers

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