Dr. Vladimir I. Vaganov Profile

Dr. Vladimir I. Vaganov

Chairman & CEO

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Author

Publications (4)

Proceedings Article | 24 April 2003 Paper

System approach to MEMS commercialization

Vladimir Vaganov, Nickolai Belov, Sebastiaan in 't Hout

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.502022

KEYWORDS: Microelectromechanical systems, Packaging, Photonics, Optics manufacturing, Manufacturing, Optical testing, Semiconducting wafers, Integrated optics, Semiconductors, Electronics

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Proceedings Article | 24 April 2003 Paper

Three-dimensional bonding technologies for MEMS

Vladimir Vaganov, Nickolai Belov, Sebastiaan in 't Hout

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.502023

KEYWORDS: Semiconducting wafers, Wafer bonding, Polymers, Metals, Microelectromechanical systems, Silicon, Anisotropic etching, Bridges, Glasses, Optical lithography

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Proceedings Article | 24 April 2003 Paper

MEMS variable optical attenuator for volume production

Vladimir Vaganov, Sebastiaan in 't Hout, Nickolai Belov

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.502020

KEYWORDS: Microelectromechanical systems, Signal attenuation, Wafer-level optics, Optics manufacturing, Variable optical attenuators, Semiconducting wafers, Reliability, Optical fabrication, Resistance, Wafer bonding

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Proceedings Article | 23 August 2002 Paper

System approach to MEMS commercialization

Vladimir Vaganov

Proceedings Volume 4906, (2002) https://doi.org/10.1117/12.480619

KEYWORDS: Microelectromechanical systems, Packaging, Photonics, Manufacturing, Optics manufacturing, Semiconducting wafers, Semiconductors, Electronics, Integrated optics, Optical testing

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