Dr. Zhengwei Wang Profile

Dr. Zhengwei Wang

at Shanghai Institute of Optics and Fine Mechanics

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Author

Publications (4)

Proceedings Article | 1 November 2021 Paper

Defocusing detection based on asymmetric placement of dual-quadrant detector

Jinlun Zheng, Xing Liu, Guodong Chen, Zhengwei Wang, Lu Wang, Tianyu Gao, Zhichang Mo, Jingsong Wei

Proceedings Volume 12057, 120572E (2021) https://doi.org/10.1117/12.2605876

KEYWORDS: Sensors, Signal detection, Objectives, Error analysis, Monochromatic aberrations, Lithography, Ferroelectric materials, Optical imaging, Wave plates, Shape analysis

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Proceedings Article | 6 June 2021 Paper

Miniature image preservation in stack structure

Zhichang Zhi-chang, Jinlun Zheng, Zhengwei Wang, Guodong Chen, Kui Zhang, Lu Wang, Qing Cao, Jingsong Wei

Proceedings Volume 11849, 118490A (2021) https://doi.org/10.1117/12.2598238

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Proceedings Article | 8 July 2019 Paper

A lift-off of pattern structures on the heat-mode resists

Zhengwei Wang, Kui Zhang, Guodong Chen, Yang Wang, Jingsong Wei

Proceedings Volume 11064, 110640C (2019) https://doi.org/10.1117/12.2539074

KEYWORDS: Lithography, Thin films, Etching, Chromium, Laser liftoff, Photoresist processing, Metals, Optical components, Glasses, Photomasks

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Proceedings Article | 8 July 2019 Paper

Positive and negative properties of laser heat-mode resists

Guodong Chen, Kui Zhang, Zhengwei Wang, Yang Wang, Jingsong Wei

Proceedings Volume 11064, 110640D (2019) https://doi.org/10.1117/12.2539689

KEYWORDS: Thin films, Crystals, Etching, Atomic force microscopy, Laser crystals, Chemical elements, Lithography, Photoresist materials, Optoelectronics, Germanium antimony tellurium

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