Mr. Xiang-Wen Xiong Profile

Xiang-Wen Xiong

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Publications (3)

Proceedings Article | 24 March 2009 Open Access

Arbitrary precision value overlay and alignment system by double positioning of mask and wafer and electronic datum and nano sensor (notice of removal)

Wynn Bear, Xiang-Wen Xiong

Proceedings Volume 7272, 727249 (2009) https://doi.org/10.1117/12.816903

KEYWORDS: Semiconducting wafers, Lithography, Optical alignment, Overlay metrology, Electron beams, Sensors, Photomasks, Computer graphics, Optical lithography, Receivers

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Proceedings Article | 29 January 2008 Open Access

Ultra-accuracy parallel electronic datum optical metrology system of systems (Notice of Removal)

Xiang-Wen Xiong, Wynn Bear

Proceedings Volume 6829, 682925 (2008) https://doi.org/10.1117/12.765821

KEYWORDS: Receivers, Manufacturing, Sensors, Optical metrology, Metrology, Electronic components, Ion beams, 3D vision, Distance measurement, 3D metrology

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Proceedings Article | 4 January 2008 Open Access

A novel material processing and manufacturing measurement system by using electronic datum (Notice of Removal)

Wynn Bear, Xiang-Wen Xiong

Proceedings Volume 6825, 68251G (2008) https://doi.org/10.1117/12.765819

KEYWORDS: Manufacturing, Laser applications, Laser processing, Laser cutting, Doppler effect, Receivers, Tolerancing, Laser welding, Laser marking, Materials processing

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