We demonstrate a high-efficiency silicon optical phase shifter based on a silicon-Sb2Se3 hybrid integrated waveguide. The optical field has large confinement in the Sb2Se3 material, leading to high optical wave modulation efficiency upon phase change of Sb2Se3. The phase change is initiated by electro-thermal heating generated by a highly durable graphene microheater positioned between the Sb2Se3 strip and the silicon slab of the hybrid waveguide. To effectively couple the phase shifter with single-mode silicon waveguides, we design a two-layer taper structure as a mode spot size converter. Utilizing this phase shifter, we implemented a Mach–Zehnder interferometer structure to function as an optical switch. The number of effective switching events exceeds 30,000, and 66 non-volatile switching levels are obtained. Our work provides an effective solution for introducing highly durable graphene microheaters on silicon-based phase-change platforms.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.