Ms. Yang Yi-Ting Profile

Yang Yi-Ting

at Feng Chia Univ

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Proceedings Article | 9 May 2018 Paper

Optical properties of Al-doped ZnO nanorods and nanotubes arrays by nanoimprint lithography

Yi-Ting Yang, Shih-Shou Lo

Proceedings Volume 10681, 106811B (2018) https://doi.org/10.1117/12.2306386

KEYWORDS: Zinc oxide, Nanorods, Nanoimprint lithography, Aluminum, Transmission electron microscopy, Optical properties, Scanning electron microscopy, Zinc, Spectroscopy, X-ray diffraction

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The purpose of this study was researching the optical properties of Al-doped zinc oxide (ZnO) nanorods and nanotubes arrays by nanoimprint lithography. First, the substrate processed with nanoimprint lithography to form nanohole arrays. Based on the processed substrate we grown the Al-dope ZnO nanorods which incorporated Al(NO₃)₃·9H₂O as the Al source via the hydrothermal method. The zinc oxide nanorods were grown by hydrothermal method because it’s a simple and effective way for low temperature synthesis. The structure of Al-doped ZnO nanorods were affected by PH value of growing solution. Due to the Al source was aluminum nitrate, so we added the ammonia water to control the PH value of growing solution. Until grown the vertically oriented Al-dope ZnO nanorods that row orderly. The ZnO nanorods was transformed to nanotube via a chemical aqueous etching process with well-controlled reaction time. Therefore, the Aldoped ZnO nanorods and nanotubes arrays were obtained. Finally, the Al-doped ZnO nanorods and nanotubes arrays were characterized by field emission scanning electron microscopy (FESEM), Transmission electron microscopy (TEM), Energy Dispersive Spectrometer (EDS) and X-ray diffraction (XRD). The FESEM and TEM images showed the morphologies of Al dope ZnO nanorods were row orderly on the substrate which processed with nanoimprint lithography. The XRD and EDS analysis showed that the Al element could be successfully doped into the ZnO lattice.

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