Dr. Yasuhiro Yoshida Profile

Dr. Yasuhiro Yoshida

at Hitachi Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Deep learning-based image quality adaptation for die-to-database defect inspection

Kosuke Fukuda, Masayoshi Ishikawa, Yasuhiro Yoshida, Kaoru Fukaya, Ryugo Kagetani, Hiroyuki Shindo

Proceedings Volume 12955, 1295522 (2024) https://doi.org/10.1117/12.3008799

KEYWORDS: Inspection, Distortion, Scanning electron microscopy, Education and training, Design, Defect inspection, Defect detection, Deep learning, Semiconducting wafers, Image quality

Read Abstract +

Proceedings Article | 27 April 2023 Poster + Paper

Machine-learning-based error detection modeling and feature scoring for error cause analysis of CD-SEMs

Yasuhiro Yoshida, Masayoshi Ishikawa, Fumihiro Sasajima, Shigeo Ohkoshi, Masami Takano

Proceedings Volume 12496, 1249625 (2023) https://doi.org/10.1117/12.2655421

KEYWORDS: Error analysis, Data modeling, Semiconductors, Feature extraction, Statistical analysis, Semiconducting wafers, Machine learning, Modeling

Read Abstract +

SPIE Journal Paper | 23 December 2022

Trainable die-to-database for large field of view e-beam inspection

Kosuke Fukuda, Masanori Ouchi, Masayoshi Ishikawa, Yasuhiro Yoshida, Kaoru Fukaya, Ryugo Kagetani, Hiroyuki Shindo

JM3, Vol. 22, Issue 02, 021004, (December 2022) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.021004

KEYWORDS: Inspection, Distortion, Education and training, Design and modelling, Scanning electron microscopy, Deformation, Defect detection, Image resolution, Machine learning, Object detection

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years