Mr. Yuya Hayashi Profile

Yuya Hayashi

at JSR Corp

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Publications (1)

Proceedings Article | 1 May 2023 Poster + Paper

Thin underlayer materials for metal oxide resist patterning

Satoshi Dei, Yuya Hayashi, Shumpei Akita, Shuhei Yamada, Kazunori Sakai, Tatsuya Kasai, Akitaka Nii, Ayaka Furusawa, Kazuya Takada, Tetsuro Kaneko, Tomoaki Seko, Eiji Yoneda, Tatsuya Sakai

Proceedings Volume 12498, 124981M (2023) https://doi.org/10.1117/12.2657918

KEYWORDS: Optical lithography, Silicon carbide, Extreme ultraviolet, Absorption, Silicon, Surface properties, Lithography, Extreme ultraviolet lithography, Etching, Semiconducting wafers

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