Dr. Yuzuru Mizuhara Profile

Dr. Yuzuru Mizuhara

Senior Engineer at Hitachi High-Tech Corp

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Publications (1)

Proceedings Article | 28 March 2017 Presentation + Paper

SEM imaging capability for advanced nano-structures and its application to metrology

Makoto Suzuki, Uki Ikeda, Yuji Kasai, Yuzuru Mizuhara, Takanori Kishimoto, Ichiro Tachibana, Naomasa Suzuki, Hajime Kawano

Proceedings Volume 10145, 101451L (2017) https://doi.org/10.1117/12.2257793

KEYWORDS: Electrons, Scanning electron microscopy, Metrology, Signal detection, Semiconductors, Inspection, Sensors, Process control, Semiconductor manufacturing, Manufacturing, Signal generators, 3D metrology, 3D acquisition, Copper, Dielectrics

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