Dr. Zhili Hao Profile

Dr. Zhili Hao

at MEMS Optical Inc

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Author

Publications (3)

Proceedings Article | 21 January 2003 Paper

Miniature thermoacoustic cryocooler driven by a vertical comb-drive

Zhili Hao, Mark Fowler, Jay Hammer, Michael Whitley, David Brown

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472893

KEYWORDS: Microelectromechanical systems, Acoustics, Cryogenics, Electronic components, Etching, Cooling systems, Silicon, Photomasks, Photoresist materials, Resonators

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Proceedings Article | 20 January 2003 Paper

Design and fabrication of a continuous membrane deformable mirror

Jay Hammer, Michele Banish, Michael Whitley, Zhili Hao, Keith Warren, Sharon Sanchez, John Harchanko

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472730

KEYWORDS: Actuators, Silicon, Semiconducting wafers, Deformable mirrors, Teeth, Indium, Mirrors, Adaptive optics, Etching, Oxides

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Proceedings Article | 20 January 2003 Paper

Single two-axis micromachined tilt mirror and linear array

Michael Whitley, Jay Hammer, Zhili Hao, Brian Wingfield, Luis Nelson

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.472858

KEYWORDS: Mirrors, Semiconducting wafers, Electrodes, Microelectromechanical systems, Finite element methods, Packaging, Silicon, Adhesives, Epoxies, Analog electronics

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