An athermal, fabrication-tolerant and flat-topped 4-channel coarse wavelength-division multiplexing(CWDM) (de)multiplexer based on cascaded Mach-Zehnder interferometers (MZIs) was proposed in this paper. A combination of strip waveguide and slot waveguide is utilized for athermalization and flat-topped transmission. By optimizing the waveguide widths and lengths of two arms in each MZI, the influence of temperature and waveguide broadening can be compensated. The best temperature dependent center wavelength shift of the four channels is about 12 pm/K, and the best waveguide broadening dependent center wavelength shift is about 0.06nm/nm, while the 1- and 3-dB bandwidths are ~14nm and ~19nm with 20nm free spectral range (FSR) and the crosstalk is < −20dB at center wavelength by utilized the power splitters based on the bend directional couplers.
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