When the topography of microstructure is reconstructed by white light interference, the scanning range of the interference fringe is used to be fixed. due to the uncertainty of the angle between the object surface and the reference surface, the actual scanning range varies accordingly. In order to obtain an accurate interference scanning range, this paper proposes an improved ViBE algorithm to automatically configure the scanning range by identifying interference fringes. To solve the ghost that occurs in the traditional ViBE algorithm when detecting interference fringes, the pixel foreground life dictionary is established to record the life cycle of the foreground pixels. The static foreground points are screened out, and the background model of the static foreground points is re-initialized to achieve initial suppression of ghosts. The foreground pixel connected region is analyzed to achieve elimination of residual ghost noise. Finally, the number of foreground pixels is taken as the basis for the existence of interference fringes. The experimental results show that the improved ViBE algorithm can quickly eliminate the ghost noise in three images and obtain the accurate interference fringe binarization foreground image.
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