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Fuyuan Deng
at Tsinghua Univ Shenzhen International Graduate School
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Author
Publications (4)
Proceedings Article | 28 November 2023 Poster + Paper
Analysis and simulation of spatial phase alignment for fabrication of double-layer grating
Shuonan Shan, Tianshi Lu, Fuyuang Deng, Xiaohao Wang, Xinghui Li
Proceedings Volume 12765, 1276524 (2023) https://doi.org/10.1117/12.2691160
KEYWORDS: Optical gratings, Optical alignment, Fabrication, Lithography, Diffraction gratings, Reflection, Overlay metrology, Holography, Finite-difference time-domain method, Stray light
Proceedings Article | 27 November 2023 Paper
Codes coupling optimization for absolute measurement
Proceedings Volume 12769, 1276910 (2023) https://doi.org/10.1117/12.2686019
KEYWORDS: Precision measurement, Performance modeling, Diffraction, Design and modelling, Analytical research, Pulse signals, Transmittance, Signal intensity, Opacity, Binary data
Proceedings Article | 19 December 2022 Presentation + Paper
An ultra-precision error estimation for a multi-axes grating encoder using quadrant photodetectors
Proceedings Volume 12319, 123190F (2022) https://doi.org/10.1117/12.2643910
KEYWORDS: Computer programming, Photodetectors, Error analysis, Mathematical modeling, Optical simulations, Laser applications, Sensors, Interferometers, Calibration, Optical filters
Proceedings Article | 19 December 2022 Presentation + Paper
A four-step laser interference lithography for patterning pixelated micro-polarizer array
Proceedings Volume 12318, 123182F (2022) https://doi.org/10.1117/12.2643872
KEYWORDS: Photomasks, Photoresist materials, Mirrors, Lithography, Polarization, Interferometers, Electron beam lithography, Laser applications, Optical lithography, Fabrication
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