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14 March 2018 Multilayer thickness inspection with millimeter-waves (Conference Presentation)
Nina Schreiner, Wolfgang Sauer-Greff, Ralph Urbansky, Fabian Friederich
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Proceedings Volume 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI; 105310P (2018) https://doi.org/10.1117/12.2300761
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
We report on our development of a millimeter-wave radar system for multilayer thickness inspection.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Nina Schreiner, Wolfgang Sauer-Greff, Ralph Urbansky, and Fabian Friederich "Multilayer thickness inspection with millimeter-waves (Conference Presentation)", Proc. SPIE 10531, Terahertz, RF, Millimeter, and Submillimeter-Wave Technology and Applications XI, 105310P (14 March 2018); https://doi.org/10.1117/12.2300761
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KEYWORDS
Inspection
Radar
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