Multi-modal tabletop EUV reflectometry for characterization of nanostructures

Yuka Esashi; Nicholas W. Jenkins; Michael Tanksalvala; Yunzhe Shao; Brendan McBennett; Joshua L. Knobloch; Henry C. Kapteyn; Margaret M. Murnane

doi:10.1117/12.2658543

27 April 2023 Multi-modal tabletop EUV reflectometry for characterization of nanostructures

Yuka Esashi, Nicholas W. Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua L. Knobloch, Henry C. Kapteyn, Margaret M. Murnane

Author Affiliations +

Proceedings Volume 12496, Metrology, Inspection, and Process Control XXXVII; 1249614 (2023) https://doi.org/10.1117/12.2658543
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

We present a tabletop EUV imaging reflectometer that can characterize the geometry and composition of nanostructures. The setup can be operated in multiple modes — intensity reflectometry, scatter-reflectometry, or imaging reflectometry depending on the length scales and periodicity of the nanostructures present. All these modes of metrology can be performed non-destructively and in a lab-scale setup, using a tabletop high-harmonic coherent EUV source.

Conference Presentation

Citation Download Citation

Yuka Esashi, Nicholas W. Jenkins, Michael Tanksalvala, Yunzhe Shao, Brendan McBennett, Joshua L. Knobloch, Henry C. Kapteyn, and Margaret M. Murnane "Multi-modal tabletop EUV reflectometry for characterization of nanostructures", Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, 1249614 (27 April 2023); https://doi.org/10.1117/12.2658543

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