Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications

Vahe Nerguizian; Mustapha Rafaf

doi:10.1117/12.549813

16 August 2004 Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications

Vahe Nerguizian, Mustapha Rafaf

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.549813
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

This article describes and provides valuable information for companies and universities with strategies to start fabricating MEMS for RF/Microwave and millimeter wave applications. The present work shows the infrastructure developed for RF/Microwave and millimeter wave MEMS platforms, which helps the identification, evaluation and selection of design tools and fabrication foundries taking into account packaging and testing. The selected and implemented simple infrastructure models, based on surface and bulk micromachining, yield inexpensive and innovative approaches for distributed choices of MEMS operating tools. With different educational or industrial institution needs, these models may be modified for specific resource changes using a careful analyzed iteration process. The inputs of the project are evaluation selection criteria and information sources such as financial, technical, availability, accessibility, simplicity, versatility and practical considerations. The outputs of the project are the selection of different MEMS design tools or software (solid modeling, electrostatic/electromagnetic and others, compatible with existing standard RF/Microwave design tools) and different MEMS manufacturing foundries. Typical RF/Microwave and millimeter wave MEMS solutions are introduced on the platform during the evaluation and development phases of the project for the validation of realistic results and operational decision making choices. The encountered challenges during the investigation and the development steps are identified and the dynamic behavior of the infrastructure is emphasized. The inputs (resources) and the outputs (demonstrated solutions) are presented in tables and flow chart mode diagrams.

Citation Download Citation

Vahe Nerguizian and Mustapha Rafaf "Infrastructure for the design and fabrication of MEMS for RF/microwave and millimeter wave applications", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.549813

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KEYWORDS

Microelectromechanical systems

Computer aided design

Packaging

Extremely high frequency

Finite element methods

Mathematical modeling

Chemical elements

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