Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk

David Fryer; Michael Lam; Kostas Adam; Chris Clifford; Mike Oliver; Christian Zuniga; John Sturtevant; ChangAn Wang; Scott Mansfield

doi:10.1117/12.2046489

31 March 2014 Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk

David Fryer, Michael Lam, Kostas Adam, Chris Clifford, Mike Oliver, Christian Zuniga, John Sturtevant, ChangAn Wang, Scott Mansfield

Author Affiliations +

Proceedings Volume 9052, Optical Microlithography XXVII; 905216 (2014) https://doi.org/10.1117/12.2046489
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

This paper extends the state of the art by demonstrating performance improvements in the Domain Decomposition Method (DDM) from a physical perturbation of the input mask geometry. Results from four testcases demonstrate that small, direct modifications in the input mask stack slope and edge location can result in model calibration and verification accuracy benefit of up to 30%. All final mask optimization results from this approach are shown to be valid within measurement accuracy of the dimensions expected from manufacture. We highlight the benefits of a more accurate description of the 3D EMF near field with crosstalk in model calibration and impact as a function of mask dimensions. The result is a useful technique to align DDM mask model accuracy with physical mask dimensions and scattering via model calibration.

Citation Download Citation

David Fryer, Michael Lam, Kostas Adam, Chris Clifford, Mike Oliver, Christian Zuniga, John Sturtevant, ChangAn Wang, and Scott Mansfield "Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk", Proc. SPIE 9052, Optical Microlithography XXVII, 905216 (31 March 2014); https://doi.org/10.1117/12.2046489

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KEYWORDS

Photomasks

3D modeling

Calibration

Data modeling

Source mask optimization

Performance modeling

Semiconducting wafers

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