Bernd Schauwecker, Michael Arnold, Christian Radehaus, Georges Przyrembel, Berndt Kuhlow
Optical Engineering, Vol. 41, Issue 01, (January 2002) https://doi.org/10.1117/1.1419188
TOPICS: Waveguides, Silicon, Refractive index, Integrated optics, Directional couplers, Optoelectronics, Beam propagation method, Microscopes, Optical engineering, Optical components
Planar optical waveguide structures in communication network applications require a number of indispensable features, e.g., low insertion loss, efficient fiber-to-chip coupling, polarization independent operation, and high integration density, as well as reliable and cost- efficient fabrication. The presented concept of integrated optical waveguide structures is based on the high refractive index material system of silicon-oxynitride on silicon. This system has the potential to meet all mentioned requirements. We describe the design and fabrication of such waveguide structures and demonstrate basic integrated optical components with good performance.