Anthony D. Garetto
Director Application Solutions
SPIE Involvement:
Author
Publications (22)

Proceedings Article | 19 September 2018 Paper
Gilles Tabbone, Kokila Egodage, Kristian Schulz, Anthony Garetto
Proceedings Volume 10775, 107750N (2018) https://doi.org/10.1117/12.2326908
KEYWORDS: Back end of line, Scanning electron microscopy, Inspection, Manufacturing, Photomasks, Image analysis, Defect inspection, Image segmentation

Proceedings Article | 16 October 2017 Paper
Kristian Schulz, Kokila Egodage, Gilles Tabbone, Anthony Garetto
Proceedings Volume 10451, 1045116 (2017) https://doi.org/10.1117/12.2280832
KEYWORDS: Photomasks, Back end of line, Manufacturing, Reliability, Scanning electron microscopy, Error analysis, Optimization (mathematics), Mask making, Semiconductors, Data communications

Proceedings Article | 28 September 2017 Paper
Kristian Schulz, Kokila Egodage, Gilles Tabbone, Christian Ehrlich, Anthony Garetto
Proceedings Volume 10446, 104460I (2017) https://doi.org/10.1117/12.2280828
KEYWORDS: Scanning electron microscopy, Photomasks, Nanoimprint lithography, Image analysis, Image processing, Image resolution

Proceedings Article | 13 July 2017 Paper
Kristian Schulz, Kokila Egodage, Gilles Tabbone, Anthony Garetto
Proceedings Volume 10454, 104540X (2017) https://doi.org/10.1117/12.2282804
KEYWORDS: Back end of line, Photomasks, Manufacturing, Inspection, Image processing, Image analysis, Semiconducting wafers, Image segmentation, Standards development, Data modeling

Proceedings Article | 5 October 2016 Paper
Proceedings Volume 9985, 99851Q (2016) https://doi.org/10.1117/12.2243620
KEYWORDS: Manufacturing, Reliability, Tolerancing, Image processing, Image enhancement, Error analysis, Inspection, Image analysis, Back end of line, Neodymium

Showing 5 of 22 publications
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