Mr. Chia-Huang Chen Profile

Chia-Huang Chen

at Changxin Memory Technologies Inc

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Publications (1)

Proceedings Article | 20 March 2019 Paper

Robust alignment mark design for DRAM using a holistic computational approach

Danying Li, Stella Zhang, Chia-Huang Chen, Youping Zhang, Alex Huang, David Xu, Yufeng Wang, Zhen Shi, Shi-lu Wang, Sheng-Tsung Tsao, Angmar Li, Andy Yang, Junwei Lu

Proceedings Volume 10961, 109610Z (2019) https://doi.org/10.1117/12.2532841

KEYWORDS: Optical proximity correction, Optical alignment, Semiconducting wafers, Optical lithography, Signal processing, Printing, Metrology, Overlay metrology

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