Proceedings Article | 24 May 2022
KEYWORDS: Diffraction, Mirrors, Microelectromechanical systems, Wavefronts, Plasmonics, Intelligence systems, Visualization, Switching, Space mirrors, Phase shift keying
By combining the piezoelectric MEMS mirror with plasmonic OMSs, we successfully demonstrated an electrically driven MEMS-OMS platform for dynamic 2D wavefront shaping with high modulation efficiencies, broadband operation, and fast speed [2].
One functionality of particular interest to the commercial applications (e.g., LiDAR) is the possibility of switching between multiple diffraction orders to allow for quasi-continuous beam steering. To realize this suggested functionality, we randomly interleaved two meta-gratings optimized at two different air gaps with distinct grating periods of Λsc and 2 Λsc. In both simulations and experiments, polarization-independent reflection power redistributions between 0th, +1st, +2nd diffraction orders are visualized, corresponding to 0⁰, 7.6⁰, and 15.4⁰ reflection directions, under normal incidence.
As a future perspective, on this MEMS-OMS platform, we foresee more versatile functionalities available, thanks to the plenty space of design freedom in both MEMS mirror and OMS sides. Currently, we are also working on other designs to explore other possibilities on this platform.
[1] Meng, C., Thrane, P., Ding, F., Gjessing, J., Thomaschewski, M., Wu, C., Dirdal, C. & Bozhevolnyi, S. I. (2021). Dynamic piezoelectric MEMS-based optical metasurfaces. Science Advances, 7(26), eabg5639.
