Mr. Denis A. Kostyukov Profile

Denis A. Kostyukov

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 15 March 2019 Paper

A. Golishnikov, D. Kostyukov, M. Putrya, V. Shevyakov

Proceedings Volume 11022, 110221Z (2019) https://doi.org/10.1117/12.2521969

KEYWORDS: Silicon, Etching, Plasma etching, Plasma, Particles, Ions, Polymerization, Photoresist materials, Semiconducting wafers, Silicon films

Proceedings Article | 30 December 2016 Paper

A. Belov, Yu. Chaplygin, A. Golishnikov, D. Kostyukov, M. Putrya, S. Safonov, V. Shevyakov

Proceedings Volume 10224, 1022404 (2016) https://doi.org/10.1117/12.2264789

KEYWORDS: Rhenium, Tungsten, Silicon, Resistance, Silicon films, Semiconducting wafers, Sensors, Control systems, Manufacturing, Copper

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases