Prof. Alexei N. Belov Profile

Prof. Alexei N. Belov

at MIET

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 15 March 2019 Paper

Formation features and electrophysical properties of ferroelectric films ZnO study

A. Zotov, A. Perevalov, V. Shevyakov, A. Belov

Proceedings Volume 11022, 110221D (2019) https://doi.org/10.1117/12.2521973

KEYWORDS: Zinc oxide, Sputter deposition, Oxygen, Heat treatments, Resistance, Argon, Annealing, Atomic layer deposition, Zinc, Thin films

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Proceedings Article | 30 December 2016 Paper

Tungsten alloyed with rhenium as an advanced material for heat-resistant silicon ICs interconnects

A. Belov, Yu. Chaplygin, A. Golishnikov, D. Kostyukov, M. Putrya, S. Safonov, V. Shevyakov

Proceedings Volume 10224, 1022404 (2016) https://doi.org/10.1117/12.2264789

KEYWORDS: Rhenium, Tungsten, Silicon, Resistance, Silicon films, Semiconducting wafers, Sensors, Control systems, Manufacturing, Copper

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Proceedings Article | 30 December 2016 Paper

Features of local anodic oxidation process

A. Belov, Yu. Chaplygin, S. Lemeshko, I. Sagunova, V. Shevyakov

Proceedings Volume 10224, 102241Q (2016) https://doi.org/10.1117/12.2264436

KEYWORDS: Oxidation, Photomasks, Oxides, Dielectrics, Conductive coatings, Modulation, Resistance, Silicon, Solid state electronics, Nanolithography

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Proceedings Article | 18 December 2014 Paper

Nanostructured chalcogenide materials for memory switching devices

O. Pyatilova, S. Gavrilov, R. Rozanov, A. Zheleznyakova, A. Belov, V. Shevyakov

Proceedings Volume 9440, 944007 (2014) https://doi.org/10.1117/12.2179474

KEYWORDS: Thin films, Bismuth, Switching, Metals, Thin film deposition, Ions, Chalcogenides, Copper, Scanning electron microscopy, Atomic force microscopy

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Proceedings Article | 18 December 2014 Paper

Aluminum anodization process modeling approach

Alexey Belov, Maksim Vorobiev, Sergey Gavrilov, Vasiliy Shevyakov

Proceedings Volume 9440, 94400Z (2014) https://doi.org/10.1117/12.2179218

KEYWORDS: Aluminum, Oxides, Interfaces, Ions, 3D modeling, Numerical simulations, Polishing, Oxygen, Metals, Oxidation

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