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Prof. Dongchao Pang
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Publications (1)
Proceedings Article | 24 November 2023 Paper
Multilayer defect compensation based on three dimensional absorber correction in EUV lithography
Zheng Hang, Sikun Li, Dongchao Pang, Longqiao Zhang, Shuai Yuan, Xiangzhao Wang
Proceedings Volume 12935, 129354E (2023) https://doi.org/10.1117/12.3007995
KEYWORDS: Printing, 3D mask effects, Multilayers, Extreme ultraviolet lithography, Extreme ultraviolet, Simulations, Diffraction, Deformation, 3D image processing, Reflection, Phase compensation
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