CONFERENCE PROCEEDINGS
Advanced Search
Einat Nagar
at KLA Israel
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 27 April 2023 Poster + Paper
Scatterometry overlay (SCOL) measurement of small cell target using pupil optimization
Itay Gdor, Einat Nagar, Tal Yaziv, Yunhua Wu, Eitan Hajaj, Yuval Lubashevsky, Daria Negri
Proceedings Volume 12496, 1249624 (2023) https://doi.org/10.1117/12.2645399
KEYWORDS: Overlay metrology, Small targets, Light sources and illumination, Diffraction gratings, Diffraction, Scatterometry, Metrology
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top