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Yunhua Wu
at KLA China
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 27 April 2023 Poster + Paper
Scatterometry overlay (SCOL) measurement of small cell target using pupil optimization
Itay Gdor, Einat Nagar, Tal Yaziv, Yunhua Wu, Eitan Hajaj, Yuval Lubashevsky, Daria Negri
Proceedings Volume 12496, 1249624 (2023) https://doi.org/10.1117/12.2645399
KEYWORDS: Overlay metrology, Small targets, Light sources and illumination, Diffraction gratings, Diffraction, Scatterometry, Metrology
Proceedings Article | 27 April 2023 Poster + Paper
Small imaging overlay metrology targets for advance nodes
Yoel Feler, Diana Shaphirov, Mark Ghinovker, Katya Gordon, Ido Ashuah, Yunhua Wu, Penny Lin
Proceedings Volume 12496, 124962M (2023) https://doi.org/10.1117/12.2657850
KEYWORDS: Design and modelling, Light sources and illumination, Overlay metrology, Semiconducting wafers, Optical parametric oscillators, Scanners, Optical proximity correction, Metrology, Equipment, Wafer-level optics
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