Mr. Elliot Oti Profile

Elliot Oti

at ASML Netherlands BV

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

Driving exposure accuracy and cost-of-ownership on DUV immersion and dry-NXT scanner products

Wim de Boeij, Bart Smeets, Massimo Viola, Peter van Gils, Elliot Oti, Stefan Lichiardopol, Jelmer Kamminga, Mohamed El Kodadi, Aditya Deshpande, Alberto Pirati

Proceedings Volume 12953, 129530S (2024) https://doi.org/10.1117/12.3009961

KEYWORDS: Scanners, Distortion, Deep ultraviolet

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Proceedings Article | 24 March 2017 Presentation + Paper

Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity

Bram van Hoof, Arjan Holscher, Ralf Gommers, Jeroen Cottaar, Marcel Raas, Samah Khalek, Jan van Kemenade, Maarten Voncken, Roelof de Graaf, Elliot Oti, Stefan Weichselbaum, Richard Droste, ByeongSoo Lee, Chansam Chang, Young Seog Kang, Young Ha Kim, Jeong-Heung Kong, Jong Hoon Jang, YoungSun Nam, Hyunwoo Hwang

Proceedings Volume 10147, 101471A (2017) https://doi.org/10.1117/12.2259794

KEYWORDS: Semiconducting wafers, Sensors, Time metrology, Scanners, Optical alignment, Calibration, Wafer testing, Overlay metrology, Metrology, Computer programming

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