Ms. FangJyun Yeh Profile

FangJyun Yeh

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Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method

Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, Yun-Ju (York) Yang, Peter Paquet, Houssam Chouaib, Zhengquan Tan

Proceedings Volume 12955, 129552D (2024) https://doi.org/10.1117/12.3009960

KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

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Proceedings Article | 10 April 2024 Poster + Paper

Optical in die NZO benefit for DRAM manufacturing

Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, Hsiao Lun Chu, Kai Lee, Yun-Ju (York) Yang, Houssam Chouaib, Zhengquan Tan

Proceedings Volume 12955, 129552B (2024) https://doi.org/10.1117/12.3009956

KEYWORDS: Overlay metrology, Semiconducting wafers, Machine learning, Scanning electron microscopy, Education and training, Critical dimension metrology, High volume manufacturing, Metrology, Mueller matrices, Spectroscopic ellipsometry

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Proceedings Article | 27 April 2023 Poster + Paper

Scatterometry and machine learning for in-die overlay solution

June Yeh, Houssam Chouaib

Proceedings Volume 12496, 124962R (2023) https://doi.org/10.1117/12.2657946

KEYWORDS: Overlay metrology, Education and training, Machine learning, Semiconducting wafers, Scatterometry, Metrology, High volume manufacturing, Data modeling, Algorithm development, Reliability

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