A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates
the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing
depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and
rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and
repetition rate of 1 kHz is used for introducing the cavities.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.