A potential method for precise and fast dicing of display glass plates is proposed in this study. This technique facilitates
the micromachining of cavities in both front and rear surfaces for a single pass of laser beam. The influences of focusing
depth, input pulse energy, and scanning speed of the laser beam are investigated to study the morphology of the front and
rear surface cavities. A commercial femtosecond laser with pulse duration of 172 fs, center wavelength of 780 nm, and
repetition rate of 1 kHz is used for introducing the cavities.
We describe true continuous-wave (CW), high-power, line-narrowed, deep-ultraviolet (DUV) light sources for the high-resolution metrology tools such as wafer inspection and mask inspection systems. The 198.5-nm CW radiation with 300-mW power has also been achieved by sum-frequency mixing (SFM) of 1064-nm output from a single-frequency Yb3+ fiber amplifier with the 244-nm radiation from a frequency-doubled argon-ion laser. The 266-nm CW DUV radiation with 5 W of maximum power has been generated by frequency doubling of 532-nm green laser output. Both sources utilize Brewster-cut CsLiB6O10 (CLBO) crystal for efficient and stable DUV light generation.
Surface relief type gratings for input laser coupling were fabricated on the PLD deposited 2 at.%Nd:GGG thin film optical waveguide by femtosecond laser interferometric processing. The morphology and coupling efficiency were experimentally evaluated. A clear periodic structure with a fringe period of approximately 800 nm and height of approximately 100 nm was obtained for a surface relief type grating induced on the target surface with a fluence of 0.92 Jcm-2. The coupling efficiency of an 808 nm-centered laser diode pumping light into the 1.35 μm thick film was measured as a function of the incident angle. Three coupling peaks were observed at 57°, 65° and 77°, each being the coupling to the TE0, TE1 and TE2 modes respectively. Each peak had a large FWHM and a maximum coupling efficiency was 3%.
We developed a medical surgical system with function variability and flexible delivery of dual-wavelength infrared fiber laser that simultaneously oscillated 3 and 2 micrometers radiation. We studied the function variability (cutting/coagulation) of this fiber laser using a specially designed filter which contained two adjacent areas with different transmission for 2 micrometers radiation. When the power of 3 micrometers radiation was set to 0.6 W and the power of 2 micrometers radiation was changed from 0 W to 0.77 W using this filter at the beam traveling speed of 0.25 mm/s, the cutting groove formed in myocardium tissue increased from 0.80 mm to 0.89 mm and the coagulation layer thickness increased from 0.41 mm to 0.85 mm. We successfully developed a filter system that could continuously control coagulation layer thickness with cutting capability constant. We studied a flexible beam delivery using a single crystal sapphire fiber. The transmission efficiency per meter for 3 and 2 micrometers radiation using a 200-micrometers core-diameter sapphire fiber was 58.0% and 60.4%, respectively. The bending loss at 3-cm loop radius was 5.6%. The high flexibility and low bending loss of the sapphire fiber might make it possible to apply the dual-wavelength infrared fiber laser to endoscopic treatment. In summary, these results may encourage the possibility for practical use of the fiber laser.
We theoretically investigated variable-function (cutting/coagulating) characteristics of the continuous wave 3 μm, 2 μm cascade Ho3+:ZBLAN fiber laser using 3D heat-conduction calculation with finite element method. We have modified a commercial-available simulator in order to calculate heat conduction and thermal ablation process in soft tissue. In this calculation we considered specific heat rise due to the thermal denaturation of protein and volume shrinkage caused by temperature elevation. Beam profile, beam traveling speed, output power, and absorption coefficient were employed to describe the laser beam. The configuration of cutting groove and temperature distribution were calculated by varying the power ratio of the two wavelengths. Coagulation layer was defined as the region that was over 60°C for 1 second because we found that birefringence loss in porcine myocardium observed by a polarizing microscope occurred on this temperature history. When we increased the power ratio of 2 micrometers radiation to the total power of 0.9 W from 0% to 100% at the traveling speed of 0.5 mm/s, the incision depth decreased form 1.45 mm to 0.25 mm, while the coagulation layer thickness increased from 0.17 mm to 0.70 mm. We experimentally performed laser cutting on the same condition by our calculation using extracted porcine myocardium and compared this experimental results with the calculated results. We demonstrated that the incision depth and coagulation layer thickness estimated by our calculation indicated good agreement with the experimental results within 20% differences regarding the function variability by 3 μm/2 μm light mixing.
We studied coagulation layer controlled incision with newly developed continuous wave 2 micrometer, 3 micrometer cascade oscillation fiber laser in vitro. Since this laser device simultaneously oscillates 2 micrometer and 3 micrometer radiation, we could change tissue interaction by arranging power ratio of 2 micrometer to 3 micrometer radiation. About one watt of total irradiation power with various power ratios was focused to extracted fresh porcine myocardium or anesthetized rabbit on an automatic moving stage to obtain line incision. Macro photograph and microscopic histology were used to observe tissue interaction phenomenon. The incised specimen showed that precise cutting groove with thin coagulation layer was attained by a 3 micrometer based radiation, meanwhile addition of 2 micrometer radiation to 3 micrometer radiation made coagulation layer thicker. A heat conduction simulator using finite-element method was used to qualitatively explain obtained coagulation layer thickness. This precise incision with controllable side coagulation layer may effective to control bleeding during incision, for instance, for skin, liver, and kidney incisions. Pure continuous wave radiation of 2 micrometer and 3 micrometer may eliminate stress wave induced tissue damage which is frequently found in Ho:YAG and/or Er:YAG tissue interactions. Moreover, sapphire fiber might offer flexible power delivery to this new laser to establish endoscopic application and/or to improved beam handling.
This paper reports two topics in the material processing using TEA CO2 lasers. We demonstrated selective ablation of hydrogenated amorphous silicon (a-Si:H) thin layer on a quartz substrate by the second harmonic (SH) radiation of TEA CO2 laser generated by AgGaSe2 nonlinear crystal. Si-H bonds contained in a-Si:H strongly absorb the 5 micrometers SH radiation and resulted in the selective ablation of the a-Si:H layer. The successful ablation processing of ethylenetetrafluoroethylene (ETFE) copolymer by the 9.6 micrometers fundamental wavelength TEA CO2 laser is also reported. Only ETFE thin film adhered to an aluminum substrate can be ablated by the TEA CO2 laser.
We demonstrated a high energy delivery of a pulsed wavelength-selected HF chemical laser by fluoride glass fibers (core/cladding equals 450/500 micrometers ). The optical energy of 19 mJ in a 540 ns pulse was successfully delivered with a peak intensity of 22 MW/cm2 at the exit core surface. We have also theoretically investigated the operational characteristics of the pulsed chain first vibrational overtone HF chemical laser using a computer code. The model used can describe simultaneously both the fundamental and overtone oscillations. The higher overtone output energy of 2.73 J/l can be obtained with a gas mixture consisting of F2/H2/He equals 10/4/786 (Torr) by successfully suppressing the ASE.
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