Gaelle Mauguen
at CEA-LETI
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12956, 1295606 (2024) https://doi.org/10.1117/12.3010477
KEYWORDS: Wafer bonding, Semiconducting wafers, Distortion, Scanners, Silicon, Optical alignment, Deformation, Adhesion, Etching, Metrology

Proceedings Article | 27 April 2023 Poster + Paper
Proceedings Volume 12496, 124962C (2023) https://doi.org/10.1117/12.2657422
KEYWORDS: Wafer bonding, Semiconducting wafers, Scanners, Silicon, Distortion, Optical alignment, Transistors, Oxides, Crystals, Etching

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