Mr. Iksun Park Profile

Iksun Park

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 27 April 2023 Presentation + Paper

Quantifying CD-SEM contact hole roughness and shape combined with machine learning-based pattern fidelity scores for process optimization and monitoring

Hyosung Lee, Seonho Lee, Hyungju Rah, Iksun Park, Jaeil Lee, Jaewoong Sohn, Yongchan Kim, Christoph Ehrlich, Philip Groeger, Sven Boese, Enrico Bellmann, Stefan Buhl, Seop Kim, Kang-san Lee

Proceedings Volume 12496, 124961P (2023) https://doi.org/10.1117/12.2657679

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Scanning electron microscopy, Image processing, Image restoration, Education and training, Contour extraction, Machine learning, Deformation, Finite element methods

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Proceedings Article | 27 April 2023 Poster + Paper

Absolute alignment measurement of underlayer and overlayer of diffraction-based overlay mark by image-based alignment metrology system

Jaeil Lee, Iksun Park, Youngjin Park, Jonghyun Hwang, Hyeonjun Ha, Jaewoong Sohn, Jaehee Lee, Jinseok Moon, Yuki Kondo, Satoshi Ando

Proceedings Volume 12496, 124962F (2023) https://doi.org/10.1117/12.2657656

KEYWORDS: Overlay metrology, Optical alignment, Metrology

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