Micro-electromechanical (MEMS) oscillators are now in production and shipping in quantity. Early
development of micro mechanical devices provided the understanding that metal beams could be
fabricated and they would resonate as a time reference. The issues of performance and price have
prevented silicon entry into the quartz dominated market until recent developments in semiconductor
processing and assembly. Today MEMS oscillators are the world's smallest programmable precision
oscillators and are displacing quartz technology in the +/- 50 ppm accuracy spec. New oscillators extend
the technology with spread spectrum, voltage control, and improved jitter performance. New ultra-thin
packaging, made possible by the small encapsulated MEMS resonators, provides the word's thinnest
precision oscillators.
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