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JongHoon Kim
at Entegris Korea
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Publications (1)
Proceedings Article | 25 May 2022 Poster + Paper
Examining strategies to control gel-like defects in EUV patterning materials
Shunji Kawato, Kozue Miura, Jinhwan Ahn, JongHoon Kim
Proceedings Volume 12055, 120550S (2022) https://doi.org/10.1117/12.2614019
KEYWORDS: Polymers, Particles, Photoresist materials, Extreme ultraviolet lithography, Extreme ultraviolet, Coating, Optical lithography, Semiconducting wafers, Contamination control, Wafer testing
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